Mass flow controller Product List and Ranking from 19 Manufacturers, Suppliers and Companies

High-Temperature Mass Flow Controller MC-3000L-TC series

This is a high-temperature compatible model of the high-performance digital mass flow controller MC-3000L series, which has a variety of features.

This is a high-temperature digital mass flow controller in a 1.125-inch size that achieves high precision of 1.0% F.S. with proprietary patented technology. It is ideal for controlling high-temperature gases such as water vapor. 【Features】 ○ RoHS compliant ○ Operating temperature up to 120°C, baking temperature up to 150°C (non-energized) ○ Equipped with a digital interface RS-485 ○ Features a sensor with proprietary patented technology ○ High-temperature compatible, high-precision digital MFC *For other functions and details, please download the catalog.

Company：リンテック東京営業所
Price：100,000 yen-500,000 yen

Piping Materials
Vacuum Equipment
Flow Control
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DeviceNet compatible mass flow controller MC-5000L

It is a super high-performance mass flow controller compatible with DeviceNet.

Mass flow controller compatible with DeviceNet, adopting our unique self-temperature correction sensor (patented in the U.S. and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with DeviceNet interface (SEMI E54, ODVA SEMI SIG MFC Profile) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts our unique self-temperature correction sensor (patented in the U.S. and Japan) ○ Connector type (horizontal or vertical) selectable ○ Fully digital operation ○ Ultra-high performance 1.125-inch width ○ Compatible with surface mount gas interface *For other functions and details, please download the catalog.

Company：リンテック東京営業所
Price：100,000 yen-500,000 yen

Piping Materials
Vacuum Equipment
Flow Control
Mass flow controller

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Liquid Mass Flow Controller LC-3000L series

We precisely control the flow of various liquids using our proprietary sensors.

This is a normally open type mass flow controller for liquids. It can control flow rates from 0.01 to 2.0 g/min (equivalent to C2H5OH). Any liquid that does not corrode stainless steel is acceptable. 【Features】 - Long-term flow stability with a flow sensor using Lintec's unique ambient temperature compensation method - Compact design with a body width of 28.6 mm and an integrated valve structure - Equipped with a general-purpose digital interface (RS-485 compliant) - High-speed response due to the use of a piezo actuator - Diaphragm valve structure adopted (Minimal dead space, structure that minimizes bubble generation) - Bypass-less structure (Easy liquid introduction and internal purging, free installation orientation) - RoHS compliant *For other functions and details, please download the catalog.

Company：リンテック東京営業所
Price：100,000 yen-500,000 yen

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Flow Control
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Low Differential Pressure Mass Flow Controller MC-3000S series

It is a mass flow controller that can operate at low differential pressure such as SDS.

This is a mass flow controller that can control gas flow rates even at low pressure using proprietary technology. 【Features】 ○ Capable of controlling 10 SCCM (N2) at a differential pressure of 6 Torr due to its unique low-pressure loss structure ○ Suitable for applications such as AsH3 and PH3, and can control gases from liquids without heating ○ Compatible with the general-purpose interface RS485 ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Equipped with a high-speed, high-performance piezo actuator *For other functions and details, please download the catalog.

Company：リンテック東京営業所
Price：100,000 yen-500,000 yen

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Flow Control
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Low-cost mass flow controller MC-10RC series

A mass flow controller developed for analysis devices and various film deposition equipment, which is low-cost yet equipped with basic performance. It contributes to the improvement of semiconductor manufacturing costs.

The MC-10 series mass flow controller for gases is a low-cost model that can contribute to improving semiconductor manufacturing costs through short delivery times. It achieves low pricing by utilizing solenoid actuators and rubber seals. 【Features】 - Achieves low pricing by adopting rubber seals - Guarantees flow accuracy of ±1.0% F.S. - Supports a wide flow range - With the optional variable range function, it can accommodate multiple specifications with a single unit (gas type, F.S., and flow can be changed) - Stable operation even in environments with high-frequency noise and direct current magnetic fields, thanks to the use of a metal case and various filters *For other functions and details, please download the PDF.

Company：リンテック東京営業所
Price：10,000 yen-100,000 yen

Piping Materials
Vacuum Equipment
Flow Control
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EtherCAT-compatible mass flow controller MC-5000C

It is a high-precision mass flow controller compatible with EtherCAT.

Mass flow controller compatible with EtherCAT, adopting our unique self-temperature compensation sensor (patented in the US and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with digital interface (SEMI E54. 20-1108) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts Lintec's unique self-temperature compensation sensor (patented in the US and Japan) ○ Fully digital operation ○ Ultra-high performance with a width of 1.125 inches ○ Compatible with surface mount gas interfaces *For other functions and details, please download the catalog.

Company：リンテック東京営業所
Price：100,000 yen-500,000 yen

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Flow Control
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MODEL EX-250S SERIES

RS485 communication function available! Compact design digital mass flow controller/meter.

The "MODEL EX-250S SERIES" is a compact digital mass flow controller/meter that allows for the switching of gas types using a rotary switch. It features RS485 communication capabilities and offers selectable analog input/output of 0-5VDC/4-20mA, as well as power supply options of ±15VDC/24VDC. The total flow control range has a response time of within 1 second. Please feel free to consult us when you need assistance. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 5 SCCM to 10 SLM ■ Accuracy: ±1% F.S. ■ Compact design ■ Gas type switching possible with a rotary switch *For more details, please refer to the PDF materials or feel free to contact us.

Company：コフロック本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
Price：Other

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MODEL 5100 SERIES

Dead volume reduction! Metal seal mass flow controller with a maximum flow rate of 1 SCCM to 20 SLM.

The "MODEL 5100 SERIES" is a metal-sealed mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume with a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

Company：コフロック本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
Price：Other

Flow Meter
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MODEL HFC-303 SERIES

Introducing a mass flow controller that supports large flow rates up to F.S. 1000 SLM in N2 conversion!

We would like to introduce our high-flow mass flow controller, 'MODEL HFC-303 SERIES'. It supports high flow rates up to F.S. 1000SLM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc. (gases), with a maximum flow rate ranging from 100 to 1000SLM (gases). Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal wire sensor ■ Valve Type: Proportional solenoid + Pneumatic two-stage valve (closed when not energized) ■ Accuracy: ±1% F.S. (at 25°C) ■ Allowable Ambient Temperature: 5 to 45°C ■ Electrical Connection: D-sub 15 pin ■ Weight: Approximately 2400g *For more details, please refer to the PDF document or feel free to contact us.

Company：コフロック本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
Price：Other

Flow Meter
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PI Mass Flow Controller "MODEL ST-500"

Metal seal MFC with diaphragm-type valve! Compatible with corrosive fluids due to EP treatment and oxidation film treatment.

The "MODEL ST-500 SERIES" is a mass flow controller equipped with PI functionality (Pressure Insensitive). It features a pressure sensor installed before the flow sensor, which captures pressure fluctuations and compares them to the pressure before the fluctuation, allowing for real-time adjustments to the valve opening. This enables stable flow control in response to pressure variations. It is suitable for gas supply processes that require stability and accuracy, such as semiconductor manufacturing equipment. 【Features】 ■ Stable flow control in response to pressure fluctuations (only for ST-500) ■ Supports DeviceNet, EtherCAT, and RS485 (only for ST-550) ■ Compatible with IGS W seal fittings ■ High-precision measurement control with S.P. accuracy, response time within 1 second across the entire flow control range ■ Multi-range function via a dedicated app (30-100% F.S.) *For more details, please download the PDF or feel free to contact us.

Company：コフロック本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
Price：Other

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Fujikin Inc. "Mass Flow Controller"

Fujikin's FCS always leads in flow (fluid) control technology!

The Fujikin FCS series is a "gas flow control device" that can be used in various industries. The FCS series offers two different product lineups with distinct control methods: the FCS-Pressure (pressure control method) series and the FCS-Thermal (thermal flow sensor control method) series.

Company：Fujikin Incorporated
Price：Other

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Mass flow controller Type 874X compatible with CANopen.

In addition to the high-speed response performance and high range availability of conventional models, it also supports CANopen!

● MFC compatible with CANOpen ● High response speed (fastest within 0.3 seconds, within 0.5 seconds for some models) ● A wide range of lineup supporting flow rates from 10 [ml/min] to 1500 [l/min] ● Protection rating IP65

Company：ビュルケルトジャパン
Price：100,000 yen-500,000 yen

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Achieving low cost is also possible! Mass flow controllers for the IoT era.

Control small to large flow rates with a single unit! Capable of handling micro to high differential pressures (10kPa to 1.0MPa)! A German-made MFC for the IoT era that also enables cost reduction.

The German manufacturing industry is gaining attention with Industry 4.0. Here’s a proposal for a mass flow controller from Bürkert, a long-established German fluid control equipment manufacturer, designed for the IoT era! 【One device, multiple roles!】 ● Capable of controlling flow rates from low to high (for example, 20 to 1500 Nl/min (N2)) with a single unit ● Smooth control even at a low differential pressure of 10 kPa thanks to the inline sensor ● Smooth control even at a high differential pressure of 1.0 MPa (10 bar) ● Complete shut-off achieved with resin seals and shut-off functionality ● Fast response to set points with stability (within 0.3 to 0.5 seconds) ● The latest models can handle maximum flow rates of up to 2500 L/min! 【Easy to implement & ready for immediate use!】 ● Shipped calibrated, so no setup or adjustment is needed for immediate use ● No dedicated power supply required (operates on DC 24V) for easy installation 【Unique to Bürkert & IoT generation】 ● Flexible support for communication methods such as OpenCAN, fieldbus, RS485, in addition to analog input/output signals ● Models with protection rating IP65 are also available ● Proposals focused on maintenance ease and space-saving designs are also possible!

Company：ビュルケルトジャパン
Price：Other

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High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds.

High-speed response within 0.3 seconds! For devices with frequent changes in set flow rate! Wide pressure range support (0.01 to 1.0 MPa).

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications that set them apart from competitors, designed for industries requiring diverse specifications, unlike those for the semiconductor industry. In addition to response speed: 【Bürkert's industrial mass flow controllers feature】 ● High pressure compatibility → Up to 1.0 MPa ● Minimum required differential pressure → 10 kPa is sufficient ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves 【Additionally, as IoT generation mass flow controllers】 ● Compatible with various communication standards EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET

Company：ビュルケルトジャパン
Price：Other

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Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.

Mass flow controller (MFC) compatible with a wide range of operating pressures. It enables high-speed response within 0.3 seconds. It can also control large flow rates!

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications tailored to different industries, setting them apart from competitors with unique features. Beyond pressure range, Bürkert's industrial mass flow controllers offer: ● Rangeability → High precision of 1:100 ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves Additionally, as IoT generation mass flow controllers, they support various communication standards: EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET.

Company：ビュルケルトジャパン
Price：Other

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Mass flow controller with a large flow rate of 2,500L and high pressure of 1.0MPa.

High-flow, high-pressure mass flow controllers (MFC) that contribute to increasing the throughput of devices and processes.

Mass flow controllers for high flow and high pressure specifications are Bürkert! While many mass flow controllers in the industry have somewhat standardized specifications, we have learned through recent activities that customers have various requests such as "I want to achieve higher flow rates" and "I want to flow without reducing pressure." [Bürkert's industrial mass flow features] ● High flow → Capable of controlling up to 2500 Nl/min (equivalent to nitrogen) with a single unit ● High pressure specifications → Supports up to 1.0 MPa Additionally, ● Low differential pressure specifications → Supports from 5 kPa ● Tight shut-off capability → Reduces costs and space for separate solenoid valves ● Response speed → From 300 msec ● Warm-up time → 1 min [Furthermore, as an IoT generation mass flow] ● Supports various communication standards Compatible with various communications such as EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET, etc.

Company：ビュルケルトジャパン
Price：Other

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ALICAT mass flow controller (low pressure loss type) delivery time 4 weeks

A mass flow controller that measures with a very small differential pressure, has very low pressure loss, and is ideal for use in low-pressure environments. Current delivery time is approximately 4 weeks.

The "MCW/MCRW series" is a mass flow controller manufactured by ALICAT, ideal for environments where low pressure is used, as it can measure with very small differential pressure, resulting in minimal pressure loss. It achieves fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer the "MCS/MCRS series," which supports 128 types of gases, including corrosive gases and refrigerants. 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 1000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：100,000 yen-500,000 yen

Other measurement, recording and measuring instruments
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ALICAT Mass Flow Controller MCV Series (for Vacuum)

ALICAT's mass flow controller with MCV/MCVS series (equipped with a vacuum shut-off valve).

The "MCV/MCVS series" is a mass flow controller manufactured by ALICAT, equipped with a shut-off valve for vacuum applications. It achieves a fast response through a laminar flow method (differential pressure type). It is equipped with a highly accurate differential pressure sensor to measure flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Available from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

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ALICAT OEM supply small low-cost mass flow controller

BASIS series! There are 8 types of gases supported, including Air.

Mass flow measurement is performed using MEMS sensors combined with ALICAT's standard control valves and PID algorithms. ■ 100ms control response - Achieves target flow quickly through PD control. It rapidly follows flow changes and provides stable flow control. - Warm-up time is 70ms, allowing for immediate operation. ■ Standard analog output/input and RS-485 communication - Control flow can be set using a 0-5VDC input. - Current flow is output as 0-5VDC, allowing for recording with loggers and other devices. - RS-485 is standard, enabling centralized monitoring with PLCs and other systems.

Company：日本スターテクノ
Price：Other

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High-pressure general-purpose analog mass flow controller 5850E

Supports all processes including semiconductor wafer processes, LCD processes, optical fiber processes, and general research applications.

An analog mass flow controller that thoroughly pursues cost performance.

Company：川口液化ケミカル川口事業所
Price：Other

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Low-cost mass flow controller SFC280ERC

Wide range of applications from vacuum film forming devices to research experimental equipment.

This is an introduction to the low-cost mass flow controllers handled by Kawaguchi Liquefied Chemical Co., which supplies gas, vacuum, and low-temperature equipment R&D.

Company：川口液化ケミカル川口事業所
Price：Other

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Compact Digital Mass Flow Controller

Supports 300mm wafer process.

Mass flow controller that achieves high precision and fast response over a wide range.

Company：川口液化ケミカル川口事業所
Price：Other

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Mass Flow Controller "Aera FC-R7700 Series"

Standard connectors and dimensions secured! Economical high-precision rubber seal model.

The "Aera FC-R7700 Series" is a mass flow controller that performs well in various applications in the field. It demonstrates its capabilities in high-precision flow control and improves cost-effectiveness by adopting rubber seals. Additionally, it features a fast response time, stabilizing flow in less than 2 seconds after setting the value. 【Features】 ■ Elastomer (rubber) seals ■ Connections compliant with VCR, VCO, and Swagelok standards ■ Full-scale flow range from 10 sccm to 200 slm ■ Normally closed or normally open solenoid control valves ■ External leak rate of less than 1.0x10-7 Pa·m3/sec (He) *For more details, please refer to the PDF document or feel free to contact us.

Company：ＩＢＳ
Price：Other

valve
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Mass Flow Controller "Aera PI-980"

Next-generation PI technology! Mass flow controller compatible with IGS method that is less affected by pressure.

The "Aera PI-980" is a pressure-sensitive type mass flow controller developed in anticipation of the growing demand for next-generation semiconductor manufacturing processes. With excellent flow stability, it enhances process reproducibility between chambers and improves production yield. Additionally, it has been verified for accuracy with real gases and supports multi-gas and multi-range applications. 【Features】 - Capable of pressure-insensitive control (less affected by pressure) - High measurement accuracy and reproducibility - Compatible with IGS method - Verified for accuracy with real gases, supports multi-gas and multi-range - Programmable in the field *For more details, please refer to the PDF materials or feel free to contact us.

Company：ＩＢＳ
Price：Other

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Digital Mass Flow Controller "Aera FC-DR980"

It combines excellent performance, operational versatility, and ease of use, contributing to significant cost reduction.

The "Aera FC-DR980" is a digital mass flow controller that offers excellent versatility and is compatible with many systems. With high-quality electronic components and a durable design, it withstands harsh operations and demonstrates outstanding long-term zero drift stability of less than 0.5% of full-scale flow even after more than a year. 【Features】 ■ Selectable modes: Analog, Analog/Digital, Digital ■ Piezo-controlled valve ■ Various alarm/diagnostic functions ■ Selectable gases and flow ranges 　※ Supported by multi-gas and multi-range specification models *For more details, please refer to the PDF documentation or feel free to contact us.

Company：ＩＢＳ
Price：Other

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Current input terminal, insulated terminal

Short delivery time and low price! Insulation terminals for use in high vacuum and ultra-high vacuum containers.

This product is an insulated terminal used for high vacuum and ultra-high vacuum containers. The cryogenic type insulated terminals range from 1/4 inch to 3/8 inch, while the vacuum type insulated terminals are available up to DC60KV and diameters of up to 3 inches. The vacuum type also includes larger diameter insulated cylindrical terminals, available up to DC20KV and diameters of up to 8 inches. 【Features】 ■ Insulated terminals and larger diameter cylindrical insulated terminals are available ■ Lineup includes cryogenic type and vacuum type ■ Mounting options include welded type, ICF flange, NW flange, etc. (for vacuum type) * For more details, please refer to the catalog or feel free to contact us.

Company：テクサム
Price：Other

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Mass Flow Meter and Mass Flow Controller Comprehensive Catalog

Providing ideal devices tailored to applications and purposes. A comprehensive catalog of flow meters featuring high-quality products.

This is the comprehensive catalog of mass flow meters and mass flow controllers handled by Bronkhorst Japan. Since 1981, Bronkhorst has continued to provide a wide range of products in the field of thermal and Coriolis mass flow meter controllers. Numerous types of standard or customized measuring instruments are utilized in R&D fields, various industrial sectors, and applications in hazardous locations. 【Contents】 - EL-FROW Series - IN-FROW Series - Ex-FROW Series - LOW-P-FLOW Series - EL-PRESS Series - OEM Solutions - LIQUI-FLOW Series, etc. For other features and details, please download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

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High pressure compatible! Flow meter, mass flow meter, mass flow controller.

A high-pressure flow meter that can handle up to 700 bar! Providing the ideal equipment tailored to your applications and purposes. A comprehensive catalog of flow meters featuring high-quality products.

This is the comprehensive catalog of mass flow meters and mass flow controllers (flow meters) handled by Bronkhorst Japan. Since 1981, Bronkhorst has continued to provide a wide range of products in the field of high-tech thermal and Coriolis mass flow meter controllers. Numerous types of standard or customized measuring instruments are utilized in R&D fields, various industrial sectors, and applications in hazardous locations. [Contents] - EL-FLOW Series - IN-FLOW Series - Ex-FLOW Series - LOW-DP-FLOW Series - EL-PRESS Series - OEM Solutions - LIQUI-FLOW Series, etc. For other functions and details, please download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

Flow Control
Mass flow controller

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Explosion-proof! Flow meter, mass flow meter, mass flow controller.

Providing ideal devices tailored to applications and purposes. A comprehensive catalog of flow meters featuring high-quality products.

This is the comprehensive catalog of mass flow meters and mass flow controllers (flow meters) handled by Bronkhorst Japan. Since 1981, Bronkhorst Hi-Tec has continued to provide a wide range of products in the field of thermal and Coriolis mass flow meter controllers. Numerous types of standard or customized measuring instruments are utilized in R&D fields, various industrial sectors, and applications in hazardous locations. [Contents] - EL-FROW Series - IN-FROW Series - Ex-FROW Series - LOW-P-FLOW Series - EL-PRESS Series - OEM Solutions - LIQUI-FLOW Series, etc. For other features and details, please download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

Flow Control
Mass flow controller

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High flow rate compatible! Flow meter, mass flow meter, mass flow controller.

A flow meter capable of handling large flow rates up to 11,000 m³/h! Providing ideal equipment tailored to applications and purposes. A comprehensive catalog of flow meters featuring high-quality products.

This is the comprehensive catalog of mass flow meters and mass flow controllers (flow meters) handled by Bronkhorst Japan. Since 1981, Bronkhorst Hi-Tec has been continuously providing a wide range of products in the field of thermal and Coriolis mass flow meter controllers. Numerous types of standard or customized measuring instruments are utilized in R&D fields, various industrial sectors, and applications in hazardous locations. [Contents] - EL-FROW Series - IN-FROW Series - Ex-FROW Series - LOW-P-FLOW Series - EL-PRESS Series - OEM Solutions - LIQUI-FLOW Series, etc. For other functions and details, please download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

Flow Control
Mass flow controller

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Mass flow controller Product List and Ranking from 19 Manufacturers, Suppliers and Companies

Mass flow controller Manufacturer, Suppliers and Company Rankings

Mass flow controller Product ranking